Refurbished Parts for Ultratech Stepper

At Lithography Solutions, we provide high-quality parts and services for lithography equipment. If you have an Ultratech stepper, let us provide you with the support you need to keep it running beautifully. Contact us to see what we can offer you, or learn more about our Ultratech stepper refurbished parts below.


For a stepper to work properly, it requires myriad different parts to support its operations. We can rebuild motors and assemblies so they work to their highest functions, and we use only great-quality parts to do so. Some of the refurbished parts for Ultratech stepper equipment that we offer include:

  • Projection lenses
  • Optical parts
  • PC boards
  • Focus motors
  • Servo motors
  • Theta drive motors
  • WAS sliders
  • Drive rods
  • Chucks
  • Air bearings
  • Arc lamps
  • Lamp power supplies

For all of these parts, we can either provide a refurbished part when they are in stock or repair your parts and send them back to you. Whatever you prefer, we will repair and test all the parts we receive to ensure they all work exactly as they should.

All the parts we offer are up to OEM standards, and we guarantee that they’ll function like new. Despite this high quality, we offer competitive prices — we understand that our services are necessary for those who have steppers due to the aging technology, so we strive to make our services affordable and attainable for anyone who needs them.


You can send your parts to us for repair, or you can have us visit your location to work with your steppers personally. We provide support for steppers, semiconductors, hard disk drives, bump processes, and analog wafer fabs all over the world. You can rely on our experience of over 20 years.

Fill out the form on our contact page to speak with one of our representatives.