Ultratech Stepper Parts and Service

You rely heavily upon your stepper to produce quality microchips. When one part or component of your stepper is not working properly, the entire process can be affected. When you need reliable, high-quality parts for your Ultratech stepper, look no further than Lithography Solutions. We offer a wide range of parts for a variety of different Ultratech models, including the Ultratech Saturn Spectrum 3 and the Ultratech Star 100.

Ultratech Models We Work With

Ultratech has a large line of steppers, and we are happy to be able to help with any of their problems.

Ultratech 2000 and 3000 platform models that we work with include the Ultratech 6700, the Ultratech 4700, the Ultratech Saturn Spectrum 3, the Ultratech Saturn Spectrum 3e, the Ultratech Saturn Spectrum 300e, the Ultratech Saturn, the Ultratech Titan, and the Ultratech 2244I.

Ultratech 1500 platform models that we work with include the Ultratech Star 100, the Ultratech Sapphire 100, the Ultratech Sapphire 100E, the Ultratech Prisma, the Ultratech NT190, the Ultratech NT160, the Ultratech 1600 DSA, the Ultratech 1900, the Ultratech 1500 MVS, the Ultratech 1700 MVS, the Ultratech 1500 and the Ultratech 1700.

Ensure that you can continue your important work with the help of our experienced, knowledgeable team. Reach out to us to see if we have parts for your specific model.

Parts and Service

We have a large inventory of Ultratech stepper parts, so whether you need parts for one of the major or minor components, you can count on us to step in when you are having issues. Our parts are always high-quality, so you can rest assured that once they are placed into your stepper, they will last for many years to come.

Not only do we offer parts for Ultratech steppers, but we can also service them. Our services for your Ultratech Titan or Saturn include comprehensive diagnostics and repair. If you find that your Ultratech 1700 or Ultratech Saturn Spectrum 3 is not working the way it should be, or if it is not working at all, contact us and we will get to work with our expert team to remedy the issue.

Why Work With Us

With over two decades in the stepper parts and service industry, you can have peace of mind that we will get your Ultratech up and running with professionalism and expertise. Our goal is for you to resume your work as soon as possible, so we will be expedient as well.


Contact the helpful team at Lithography Solutions for a quote today by calling (602) 690-9991, emailing Sales@lithosolution.com, or filling out our handy online contact form.